A new technical paper titled “Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review” was published by researchers at KU Leuven and imec.

When using an analytically equipped scanning electron microscope (SEM), you aim to collect useful information from your samples. This entails asking particular questions based on your application. For ...

Raman analysis works by shining a laser on a sample and detecting the inelastically scattered photons. The resulting Raman spectrum provides information about the molecular structure and composition ...

An example of a correlative study between XRM and FIB-SEM has been presented in an earlier study. 1 This article will expand the correlation one step beneath the length scale to link FIB-SEM and TEM, ...

The interaction volume of a characteristic X-Ray emission can be seen in Figure 1. Typical EDS analysis in an SEM is carried out at relatively high energy (greater than 10 kV), which results in a vast ...