This study is led by Prof. Hai-Zhou Lu and Prof. Qihang Liu (Shenzhen Institute for Quantum Science and Engineering and Department of Physics, Southern University of Science and Technology). Every ...
All-solid-state batteries are expected to replace conventional batteries with a liquid electrolyte thanks to their improved safety, durability, and capacity. However, the electric double layer (EDL) ...
One of the main challenges of a Dual Damascene (DD) via-first process is the control of the Critical Dimensions (CDs) in the lithography of the trenches. The PhotoResist (PhR) thickness presents ...