Sheet resistance monitoring is essential for ion implant doping and anneal characterization. It’s also commonly used in processes such as ion implantation, metal deposition, diffusion, and epitaxial ...
October 13, 2014. TEGAM Inc., a supplier of micro-ohmmeters, has just introduced five new Kelvin probes. When used with TEGAM's R1L bond meters or the 1740 or 1750 micro-ohmeters, they enable ...
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